Ion Current Component in the Ionization Current Multiplication Factor

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概要

• 論文の詳細を見る
• 2003-01-24

著者

• Otsubo M

  Miyazaki University

• HONDA C.

  Miyazaki University

• TSURUGIDA K.

  Miyakonojo National College of Technology

• OTSUBO M.

  Miyazaki University

• IKUTA N.

  Chiba Institute of of Technology

関連論文

• Mo Thin Film Prepared by Capacitively Coupled Neutral Loop discharge Sputter System and its Plasma Characteristics
• Ion Current Component in the Ionization Current Multiplication Factor

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