Effect of Sputtering Power of Aluminum Film in Aluminum Induced Crystallization of Low Temperature Polycrystalline Silicon Film
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概要
- 論文の詳細を見る
- 2007-04-15
著者
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Chu Hsiao-yeh
Department Of Mechanical Engineering Kun Shan University
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Weng Ming-Hang
National Nano Device Laboratories, Tainan, Taiwan, R.O.C.
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Nien Chih-Cheng
Institute of Manufacturing Engineering, National Cheng Kung University, Taiwan, R.O.C.
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Weng Ming-hang
National Nano Device Laboratories
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Nien Chih-cheng
Institute Of Manufacturing Engineering National Cheng Kung University
関連論文
- Effect of Sputtering Power of Aluminum Film in Aluminum Induced Crystallization of Low Temperature Polycrystalline Silicon Film
- Microstructures and Microwave Dielectric Properties of ($1-x$)MgO$\cdot$$x$BaO$\cdot$TiO2 Ceramics