Improvements in Electrical Characteristics of Plasma Enhanced Chemical Vapor Deposition-Tetraethylorthosilicate-SiO_2 by Atomic Hydrogen Passivation via Hot-Wire Technique

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2006-12-25

著者

• Hanna Junichi

  Imagining Science And Engineering Laboratory Tokyo Institute Of Technology

• LIM Cheolhyun

  Imagining Science and Engineering Laboratory, Tokyo Institute of Technology

• Lim Cheolhyun

  Imagining Science And Engineering Laboratory Tokyo Institute Of Technology

関連論文

• Improvements in Electrical Characteristics of Plasma Enhanced Chemical Vapor Deposition-Tetraethylorthosilicate-SiO_2 by Atomic Hydrogen Passivation via Hot-Wire Technique

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