Measurements of Electron Energy Distribution Functions in Pulse-Modulated Ar and Ar/O_2 Inductively Coupled Plasmas using Laser Thomson Scattering
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Uchino Kiichiro
Plasma Engineering Laboratory Department Of Applied Science For Electronics And Materials Interdisci
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Nakamura Akinobu
Plasma Engineering Laboratory Department Of Applied Science For Electronics And Materials Interdisci
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El-sabbagh Mansour
Plasma And Laser Laboratory Department Of Physics Faculty Of Science Al-azhar University
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YANAGAI Toshiro
Plasma Engineering Laboratory, Department of Applied Science for Electronics and Materials Interdisc
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YAMAGATA Yukihiko
Plasma Engineering Laboratory, Department of Applied Science for Electronics and Materials Interdisc
関連論文
- Measurements of Electron Energy Distribution Functions in Pulse-Modulated Ar and Ar/O_2 Inductively Coupled Plasmas using Laser Thomson Scattering
- Measurements of Electron Energy Distribution Functions in Pulse-Modulated Ar and Ar/O2 Inductively Coupled Plasmas using Laser Thomson Scattering