Aggregation of Nitrogen on Oxygen Precipitate in Annealed Czochralski Silicon Wafer Observed by Secondary Ion Mass Spectroscopy Measurement

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概要

• 論文の詳細を見る
• 2006-02-25

著者

• YAMADA-KANETA Hiroshi

  Fujitsu Limited

• Yamada Kaneta

  Fujitsu Limited

• Tanahashi Katsuto

  Fujitsu Limited

関連論文

• Influence of Grown-in Hydrogen on Thermal Donor Formation and Oxygen Precipitation in Czochralski Silicon Crystals
• Aggregation of Nitrogen on Oxygen Precipitate in Annealed Czochralski Silicon Wafer Observed by Secondary Ion Mass Spectroscopy Measurement

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