Miniaturization of Spherically Contoured Rectangular AT-cut Quartz-Crystal Resonators by using Reactive Ion Etching
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概要
- 論文の詳細を見る
This paper describes resonant characteristics of spherically contoured AT-cut quartz-crystal resonators, and a novel fabrication process. The fabrication process is based on a photolithographic process suitable for the mass production. Further, the time required to finish quartz blanks into the spherically contoured shape is dramatically less than for conventional methods. Our measurements show that $Q$ of the spherically contoured resonators fabricated with our method are an order of magnitude higher than those resonators without the spherical shape.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-15
著者
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Abe Takashi
Graduate School Of Agricultural Science Tohoku University
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Li Xinghua
Graduate School Of Engineering Tohoku University
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Abe Takashi
Graduate School Of Engineering Tohoku University
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Shimamoto Hisanori
Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-857
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Shimamoto Hisanori
Graduate School Of Engineering Tohoku University
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