Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-06-15
著者
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Kakami Akira
On-site Sensing And Diagnosis Research Laboratory National Institute Of Advanced Industrial Science
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OHSHIMA Ichiro
On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science
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AKIYAMA Morito
On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science
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TABARU Tatsuo
On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science
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KAMOHARA Toshihiro
On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science
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OOISHI Yasunobu
On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science
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NOMA Hiroaki
On-site Sensing and Diagnosis Research Laboratory, National Institute of Advanced Industrial Science
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Ohshima Ichiro
On-site Sensing And Diagnosis Research Laboratory National Institute Of Advanced Industrial Science
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Ooishi Yasunobu
On-site Sensing And Diagnosis Research Laboratory National Institute Of Advanced Industrial Science
関連論文
- Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms
- Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms