Planarization of Si Ridges in Sequential Lateral Solidification Process
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-07-15
著者
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Lee Jin
Basic Research Lab. Electronics And Telecommunications Research Institute
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Chung Choong-heui
Basic Research Lab. Electronics And Telecommunications Research Institute
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Kim Yong-hae
Basic Research Lab. Electronics And Telecommunications Research Institute
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Sohn Choong-yong
Basic Research Lab. Electronics And Telecommunications Research Institute
-
MOON Jaehyun
Basic Research Lab., Electronics and Telecommunications Research Institute
関連論文
- Planarization of Si Ridges in Sequential Lateral Solidification Process
- Planarization of Si Ridges in Sequential Lateral Solidification Process