反応性固相エピタキシャル成長法 : 層状複合酸化物の高品質エピタキシャル薄膜を作製するための強力な手法(第59回日本セラミックス協会進歩賞受賞に関する総説及び論文)

概要

論文の詳細を見る
High-quality epitaxial film growth for several complex oxides having layered structure by "Reactive Solid-Phase-Epitaxy (R-SPE)" is reviewed. Materials focused are InGaO_3(ZnO)_m (m=integer), LaCuOS and Na_xCoO_2(x〜0.8). For the epitaxial film growths of the complex systems with a complicated layered crystal structure, it is necessary to form an epitaxial template layer before the film deposition, followed by the thermal annealing of the bilayer films. The layers subsequently deposited on the template layer may be amorphous, polycrystalline or powder, which allows control of the epitaxially grown films in the R-SPE method.
社団法人日本セラミックス協会の論文
2006-02-01