Initial Stage of SiO_2/Si Interface Formation on Hydrogen-Terminated Silicon Surfaces

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概要

• 論文の詳細を見る
• Komiyama-Pressの論文
• 1995-08-21

著者

• KATAYAMA M.

  Department of Electrical & Electronic Engineering, Kanazawa University

• Tate N.

  Department Of Electrical And Electronic Engineering Musashi Institute Of Technology

• IIJIMA E.

  Shin-Etsu Handotai Co. Ltd.

• AIBA T.

  Shin-Etsu Handotai Co. Ltd.

• YAMAUCHI K.

  Shin-Etsu Handotai Co. Ltd.

• NOHIRA H.

  Shin-Etsu Handotai Co. Ltd.

• HATTORI T.

  Shin-Etsu Handotai Co. Ltd.

関連論文

• Transient Nature of Argon and Molecular Gas-Seeded Argon Inductive Thermal Plasmas in Pulse Amplitude Modulation Approach
• Performance Analysis of a Multi Processing-Gain CDMA System with Interference Cancellation
• Initial Stage of SiO_2/Si Interface Formation on Hydrogen-Terminated Silicon Surfaces

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