Direct Formation of Selective CVD-Al Contact Plug on Titanium Silicide Obtained by Silicidation of Titanium Including Nitrogen
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-08-21
著者
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Komiya Takayuki
Technology Development Center Lsi Division Kawasaki Steel Corp.
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Shinriki Hiroshi
Technology Development Center Lsi Division Kawasaki Steel Corp.
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TAKAI Youichi
Technology Development Center, LSI Division, Kawasaki Steel Corp.
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Takai Youichi
Technology Development Center Lsi Division Kawasaki Steel Corp.