Komiya Takayuki | Technology Development Center Lsi Division Kawasaki Steel Corp.

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概要

• KOMIYA Takayukiの詳細を見る
• 同名の論文著者
• Technology Development Center Lsi Division Kawasaki Steel Corp.の論文著者

関連著者

• Komiya Takayuki

  Technology Development Center Lsi Division Kawasaki Steel Corp.

• Shinriki Hiroshi

  Technology Development Center Lsi Division Kawasaki Steel Corp.

• TAKAI Youichi

  Technology Development Center, LSI Division, Kawasaki Steel Corp.

• Takai Youichi

  Technology Development Center Lsi Division Kawasaki Steel Corp.

著作論文

• Direct Formation of Selective CVD-Al Contact Plug on Titanium Silicide Obtained by Silicidation of Titanium Including Nitrogen

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