Theoretical Study on the Formation Process of Empty Space in Silicon (ESS)
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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Mitsutake Kunihiro
Process & Manufactruing Engineering Center Semiconductor Company Toshiba Corporation
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Mitsutake Kunihiro
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Ushiku Yukihiro
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
関連論文
- Micro-structure Transformation of Silicon : A Newly Developed Transformation Technology for Patternin Silicon Surfaces using the Surface Migration of Silico Atoms by Hydrogen Annealing
- Theoretical Study on the Formation Process of Empty Space in Silicon (ESS)