Indium Profile Control for Super Steep Retrograde (SSR) Well
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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Mineji A.
Ulsi Device Development Division Nec Electron Devices Nec Corporation
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Kitajima H.
Ulsi Device Development Division Nec Electron Devices Nec Corporation
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MATSUDA T.
ULSI Device Development Division, NEC Electron Devices, NEC Corporation
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NISHIO N.
ULSI Device Development Division, NEC Electron Devices, NEC Corporation
関連論文
- Indium Profile Control for Super Steep Retrograde (SSR) Well
- Lateral Diffusion Distance Measurement for 40-80nm Junctions by Etching/TEM-EELS Method