RIE Process Limit Consideration Through Profile Simulation

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概要

• 論文の詳細を見る
• 1996-05-30

著者

• Park Jin-sung

  Cae Samsung Electronics Co. Ltd

• Lee Sang-hoon

  Cae Samsung Electronics Co. Ltd

• PARK Jin-Sung

  CAE, Samsung Electronics Co., LTD

• LEE Hoong-Joo

  CAE, Samsung Electronics Co., LTD

• KIM Kyung-Ho

  CAE, Samsung Electronics Co., LTD

• LEE Sang-Hoon

  CAE, Samsung Electronics Co., LTD

• Lee Hoong-joo

  Cae Samsung Electronics Co. Ltd

• Kim Kyung-ho

  Cae Samsung Electronics Co. Ltd

関連論文

• RIE Process Limit Consideration Through Profile Simulation
• Automatic Optical Proximity Correction Using Aerial Image Simulation and Newton Optimization Scheme

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