Automatic Optical Proximity Correction Using Aerial Image Simulation and Newton Optimization Scheme

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概要

• 論文の詳細を見る
• 1996-05-30

著者

• Lee S‐h

  Cae Samsung Electronics Co. Ltd.

• KIM Kyung-Ho

  CAE, Samsung Electronics Co., LTD

• LEE Sang-Hoon

  CAE, Samsung Electronics Co., LTD

• Kim K‐h

  Cae Samsung Electronics Co. Ltd.

• PARK Chul-Hong

  CAE, Samsung Electronics Co., LTD.

• KIM Yoo-Hyon

  CAE, Samsung Electronics Co., LTD.

• YUN Chan-Su

  CAE, Samsung Electronics Co., LTD.

• Kim Yoo-hyon

  Cae Samsung Electronics Co. Ltd.

• Park Chul-hong

  Cae Samsung Electronics Co. Ltd.

関連論文

• RIE Process Limit Consideration Through Profile Simulation
• Automatic Optical Proximity Correction Using Aerial Image Simulation and Newton Optimization Scheme

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