Thickness and Surface Profile Measurement by a Sinusoidal Wavelength-Scanning Interferometer

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概要

• 論文の詳細を見る
• 2005-08-01

著者

• Sasaki Osami

  Faculty Of Engineering Niigata University

• SUZUKI Takamasa

  Faculty of Engineering, Niigata University

• Sasaki Osami

  Niigata Univ. Niigata Jpn

• Suzuki Takamasa

  Faculty Of Engineering Niigata University

• Suzuki Takamasa

  Niigata Univ. Niigata Jpn

• AKIYAMA Hisashi

  Graduate School of Science and Technology, Niigata University

• Akiyama Hisashi

  Graduate School Of Science And Technology Niigata University

関連論文

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• Photothermal Phase-Modulating Laser Diode Interferometer with High-Speed Feedback Control
• Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement
• Grating Interferometer Using ±1st Order Beams for Step-Profile Altitude Difference Measurement
• A Tunable External Cavity Laser Diode Possessing a Stable Wavelength
• Measurement of Sectional Profile of a Cylinder using a Sinusoidally Vibrating Light with Sinusoidal Intensity
• Thickness and Surface Profile Measurement by a Sinusoidal Wavelength-Scanning Interferometer

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