A study of antireflective and antistatic coating with ultrafine particles
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概要
- 論文の詳細を見る
- 1996-04-01
著者
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Ono Masahiko
Mechanical Engineering Research Laboratory Hitachi Ltd
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Kawamura Takao
Electrical Engineering College Of Engineering University Of Osaka Prefecture
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Kawamura Takao
Electron Tube And Devices Division Hitachi Ltd
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ENDO YOSHISHIGE
Mechanical Engineering Research Laboratory, Hitachi Ltd
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YAMADA TOSHIHIRO
Mechanical Engineering Research Laboratory, Hitachi Ltd
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KAWAMURA HIROMITSU
Electron Tube and Devices Division, Hitachi Ltd
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KOBARA KATSUMI
Electron Tube and Devices Division, Hitachi Ltd
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Kobara Katsumi
Electron Tube And Devices Division Hitachi Ltd
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Endo Yoshishige
Mechanical Engineering Research Laboratory Hitachi Ltd
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Kawamura Hiromitsu
Electron Tube And Devices Division Hitachi Ltd
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Yamada Toshihiro
Mechanical Engineering Research Laboratory Hitachi Ltd
関連論文
- A study of antireflective and antistatic coating with ultrafine particles
- DC Bias Method for a-Si:H Deposition on a Dielectric Substrate Using Electron Cyclotron Resonance Plasma
- Study of the process for forming microscopic surface bumps with ultra-fine particles