Relativistic Focus Condition for E-Beam Projection Lithography
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-12-15
著者
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Kim Jung-il
School Of Physics Seoul National University
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Park Gun-sik
School Of Physics Seoul National University
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Yoo In-kyeong
U-team Samsung Advanced Institute Of Technology
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WEI Yanyu
School of Physics, Seoul National University
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KIM Dong-Wook
U-team, Samsung Advanced Institute of Technology
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Wei Yanyu
School Of Physics Seoul National University
関連論文
- Relativistic Focus Condition for E-Beam Projection Lithography
- Electromagnetic Wave Propagation through an Azimuthally Asymmetric Helix Slow Wave Structure
- Smith-Purcell Radiation with Three-Dimensional Simulation
- Simplified Approach to the Nonlinear Analysis in Helix Slow-Wave-Structure for a Traveling Wave Tube
- Analysis of Axis-Encircling Electron Beam Using a Single-Cusp Magnetic Field
- Relativistic Focus Condition for E-Beam Projection Lithography
- Electromagnetic Wave Propagation through an Azimuthally Asymmetric Helix Slow Wave Structure