残留応力が超高圧水銀放電灯バルブ部の破壊強度に及ぼす影響

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Super high-pressure mercury discharge lamps have been employed as a light source on photolithography exposure process, such as patterning Semiconductors, LCDs and PCBs. These lamps have been used under more than 1.OMPa of internal pressure, and temperatures on the outer surfaces of their bulbs reach more than 500℃. Thus, the safety for their ruptures as well as bulb shapes, materials and the employed conditions must be taken into consideration in bulb design. The authors had investigated the effects of pressure and thermal loads on the bulb ruptures. Furthermore, the optimal shapes of bulbs under the above two factors have been studied. In addition to the two factors mentioned above, It is assumed that the effect of "Residual Stress" on the bulb rupture will be substantial. It has been known empirically that the residual stress of the bulb of the lamps are influenced by the employed conditions and it may be occurred when the bulb temperature at the outer surfaces is more than 900℃. Therefore, the objective of this study is to investigate the effects of the residual stress on the lamp bulb rupture. Firstly, the residual stress in the lamps are observed in the blinking tests. In the experiments, the relationship between the blinking numbers and the residual stress in the bulbs and the temperature distribution at the bulb outer surface were investigated. Distribution of the residual stress was calculated by the FEM under the some experimental conditions and the numerical results were compared with the experimental results. As the results, it was found that the tendency of the experimental results were found to be in fairy good agreements with the calculated results and maximum value of the calculated residual stress was 17 MPa. The values of the residual stress were found to be increased as the temperature and the cooling rate were increased and the direction of the maximum principle stress at the outer surface was opposite to that at the surface. It was assumed from the results that the residual stress was influenced by the temperature and the cooling rate. Furthermore, it was assumed that the residual stress was superposed with the stress occurred due to the internal pressure and rupture might be happened. In addition, the authors propose that the lamps should be used under lower temperature by which the residual stress is not occurred.
社団法人照明学会の論文
2005-02-01

残留応力が超高圧水銀放電灯バルブ部の破壊強度に及ぼす影響

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