複数の負荷作用が超高圧水銀放電灯封止部の破壊に及ぼす影響

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Super high-pressure mercury discharge lamps have been used as the light source for photolithography exposure process. In general, they are used in manufacturing Liquid crystal displays (LCDs), Printed circuit boards (PCBs), semiconductors and other devices. Their working internal pressure is well known to be normally more than 1.0 MPa, and their temperature at the bulb outer is more than 500℃. Therefore, they are required to be secured for rupture, because they are subjected to internal pressure, thermal loadings, and so on in their services. Furthermore, rupture may occur from the sealed parts in the lamps under the loadings mentioned above. Thus, the mechanical characteristics of the sealed parts need to be examined. The objectives of the paper were to examine the safety for rupture from their sealed parts of the working lamps under internal pressure and thermal loadings by the experiments and FEM stress calculations. Rupture tests of lamps were carried out under repeated static water pressure. In addition, experiments were done under thermal loadings. The following results were obtained, l) It was found that the effect of repeated loadings such as internal pressure and thermal loadings were substantial on the strength of the sealed parts in the lamps. 2) Fractures of the sealed parts were observed to be initiated from the interfaces where silica glass and molybdenum foil were joined. 3) From the FEM stress calculations, it was found that the strength of sealed parts was greater in operation than at room temperature. 4) Finally, the authors proposed the limited desirable pressure and temperature for safety design of lamps.
社団法人照明学会の論文
2004-10-25

複数の負荷作用が超高圧水銀放電灯封止部の破壊に及ぼす影響

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