Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel)

スポンサーリンク

概要

• 論文の詳細を見る

• We have proposed and developed Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel). This actuator consists of two fixed electrodes having many oblique ciliary electrodes distributed on a plate, which like foxtail grass, and a moving electrode that is sandwiched by the fixed electrodes. When the voltage is applied between the fixed electrode and the moving electrode, the electrostatic force is generated at the gap between the moving electrode and the ciliary electrodes, and the moving electrode sticks to the ciliary electrodes and is attracted to the fixed electrode. The moving electrode moves parallel to the fixed electrode as well as perpendicularly to it. The E-Maccel was fabricated by micromachining. The ciliary electrodes were made of two-layer polyimide film. The 4382 ciliary electrodes, each of which was 3 μm thick, 300 μm long and 150 μm wide, were fabricated on a 20 mm x 20 mm Pyrex glass plate. The fabricated E-Maccel was driven, and the movement of 9.6 μm/cycle was observed at the driving voltage of 150 V.

• 社団法人 電気学会の論文
• 2004-10-01

著者

• Yano Shuichi

  Department Of Pulmonary Medicine National Matsue Hospital

• MINAMI Kazuyuki

  Department of Radiology, Fujita Health University

• Minami Kazuyuki

  Department Of Mechanical Engineering Yamaguchi University

• Yano Shuichi

  Department Of Mechanical Engineering Yamaguchi University

関連論文

• Early and delayed Tc-99m ECD brain SPECT in SLE patients with CNS involvement
• Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel)
• High Rate Deposition of Silicon Dioxide Membrane by Excimer Laser Enhanced Projection Chemical Vapor Deposition from Organic Compounds at Low Temperature
• Expansive negative T waves without myocardial damage may be a premonitory sign of transient cerebral ischemia
• Henoch-Schonlein Purpura Associated with Pulmonary Mycobacterium avium-intracellulare Complex
• Lymphadenopathy Due to Paradoxical Worsening of Miliary Tuberculosis Following Rubella Infection
• A Limited Form of Wegener's Granulomatosis with Bronchiolitis Obliterans Organizing Pneumonitis-like Variant in an Ulcerative Colitis Patient
• Pneumonia from intrabronchial pseudallesheriasis in a woman with no immunocompetent defects
• Lymphadenopathy due to paradoxical worsening of miliary tuberculosis following rubella infection
• A case of miliary tuberculosis developed after an urgent operation of a ruputure of an abdominal aortic aneurysm
• A Case of Sinobronchial Syndrome Complicated with Myeloperoxidase Antineutrophil Cytoplasmic Antibody Associated Vasculitis: Review of the Literature
• Tuberculous hilar lymphadenopathy progressing after isoniazid administration
• A Limited Form of Wegener's Granulomatosis with Bronchiolitis Obliterans Organizing Pneumonitis-like Variant in an Ulcerative Colitis Patient.

もっと見る 閉じる

スポンサーリンク