Silicon to Silicone: Stretching the Capabilities of Micromachines with Electroactive Polymers (特集:ユビキタス時代のMEMS)

概要

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Electroactive polymer transducers have many features that are desirable for MEMS devices. An especially attractive type of electroactive polymer is dielectric elastomer. Dielectric elastomers, transducers that couple the deformation of a rubbery polymer film to an applied electric field, show particular promise with features such as simple fabrication in a variety of size scales, high strain and energy density, high efficiency and fast speed of response, and inherent flexibility, environmental tolerance, and ruggedness. A variety of actuator configurations has been demonstrated at the small size scales needed for MEMS devices, including rolled “artificial muscle" actuators, framed and bending beam actuators for efficient opto-mechanical switches, and diaphragm and thickness mode actuators for pumps and valves. The performance benefits of electroactive polymers can allow for new generations of devices in microrobotics, communications, and biotechnology. Several challenges remain for electroactive polymers, including microfabrication, integration with driving electronics, and operational lifetime.
社団法人電気学会の論文
2004-08-01