A Novel Wet Etching Process of Pb(Zr, Ti)O_3 Thin Films for Applications in Microelectromechanical System
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-30
著者
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LU Jian
Department of Applied Physics, Nanjing University of Science & Technology
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Lu Jian
Department Of Applied Physics Nanjing University Of Science And Technology
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Chu Jiaru
Department Of Precision Machinery And Instrumentation University Of Science And Technology Of China
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Chu Jiaru
Department Of Precision Machinery And Precision Instrumentation University Of Science And Technology
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ZHENG Kelu
Department of Precision Machinery and Precision Instrumentation, University of Science and Technolog
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Zheng Kelu
Department Of Precision Machinery And Precision Instrumentation University Of Science And Technology
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Lu Jian
Department Of Precision Machinery And Precision Instrumentation University Of Science And Technology
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- A Novel Wet Etching Process of Pb(Zr, Ti)O_3 Thin Films for Applications in Microelectromechanical System
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