Mechanical Properties of Extremely Thin B-C-N Protective Layer Deposited With Helium Addition

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-15

著者

• Wang M

  School Of System Engineering Nippon Institute Of Technology

• Wang Mei

  School Of System Engineering Nippon Institute Of Technology

• Miyake Shojiro

  School Of System Engineering Nippon Institute Of Technology

関連論文

• Mechanical Properties of Extremely Thin B-C-N Protective Layer Deposited With Helium Addition

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