Surface Acoustic Wave Sensors

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概要

• 論文の詳細を見る

• Acoustic wave sensors are highly sensitive in detecting the properties of solid or fluid materials in contact with their surfaces, including the surface mass change, liquid density, liquid viscosity and electrical conductivity. In this paper, primarily, the commonly used acoustic wave sensors are reviewed and their mass sensitivities are compared. The fundamentals of the sensing system using the shear horizontal surface acoustic wave (SH-SAW) sensor on a 36° rotated Y-cut X-propagating LiTaO3 are described. Since the high sensitivity of the electrical perturbation is a significant advantage of the SH-SAW sensor, its applications based on acoustoelectric interaction are also presented.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-05-15

著者

• SHIOKAWA Showko

  A&R Center for Surface Wave Technology

• Kondoh Jun

  Department Of Opto-electronic And Mechanical Engineering Faculty Of Engineering Shizuoka University

関連論文

• Development of Novel Atomization System Based on SAW Streaming
• Measurements of Conductivity and pH of Liquid Using Surface Acoustic Wave Devices : Ultrasonic Measurement
• Development of Novel Atomization System Based on SAW Streaming
• Simultaneous Detection of Density and Viscosity Using Surface Acoustic Wave Liquid-Phase Sensors
• Surface Acoustic Wave Sensors

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