Fabrication of Hollow Silica Microspheres through the Self-assembly Behavior of Polymers in W/O Emulsion
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概要
- 論文の詳細を見る
- 2003-07-05
著者
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Oh S‐g
Department Of Chemical Engineering Hanyang University And Cups
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Oh Seong-geun
Department Of Chemical Engineering Hanyang University
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Bae Seong-youl
Department Of Chemical Engineering Hanyang University
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PARK Jae-Hyung
Department of Chemical Engineering, Hanyang University and CUPS
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Park Jae-hyung
Department Of Chemical Engineering Hanyang University And Cups
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- Fabrication of Hollow Silica Microspheres through the Self-assembly Behavior of Polymers in W/O Emulsion
- Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation
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