微細電極構造を有する新しい容量式湿度センサ

概要

論文の詳細を見る
The capacitive-type sensor with a new microelectrode to suppress the swelling of the humidity sensitive polymer film was developed for prototype purpose utilizing the MEMS ( Micro Electro Mechanical Systems ) technology to overcome one of the weak points of conventional sensors. The first trial sample made as a prototype sensor showed a steep standing up of the sensor capacitance output at the lower humidity region. In addition, the sensor capacitance output has increased steeply in the high humidity region after the sensor was left in a hot and humid atmosphere for a long time. It is explained that one of the causes is the water adsorption on the surface of the sensor, due to the change of the state of the polymer surface from hydrophobic into hydrophilic. The influence of the polymer surface on the sensor performance was suppressed by applying an additional shield metal film on top of the polymer surface. As a result the sensor with improved sensor structure showed an excellent performance within the range of 10-50 %RH after the exposure to a hot and humid atmosphere.
社団法人電気学会の論文
2004-03-01