Fluoride Antireflection Multilayers with High Transmittance for ArF Excimer Laser by Ion Beam Sputtering Method
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2004-02-15
著者
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Yoshida T
Central Research Laboratory Research And Development Department Japan Aviation Electronics Industry
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YOSHIDA Toshiya
Central Research Laboratory, Research and Development Department, Japan Aviation Electronics Industr
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NISHIMOTO Keiji
Central Research Laboratory, Research and Development Department, Japan Aviation Electronics Industr
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ETOH Kazuyuki
Central Research Laboratory, Research and Development Department, Japan Aviation Electronics Industr
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Etoh Kimitoshi
Central Research Laboratory Research And Development Department Japan Aviation Electronics Industry
関連論文
- Fluoride Antireflection Multilayers with High Transmittance for ArF Excimer Laser by Ion Beam Sputtering Method
- Development of High-Reflection Mirrors of Fluoride Multilayers for F_2 Excimer Laser by Ion Beam Sputtering Method
- In-line Optical Lever System for Ultrasmall Cantilever Displacement Detection