Electromagnetically Actuated Surface Micromachined Free Standing Torsion Beam Micromirror Made by Electroplated Nickel
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-01-15
著者
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Kumar R
Lilit Beam Line National Nanotechnology Laboratory-tasc Istituto Nazionale Per La Fisica Materia (in
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Di Fabrizio
Lilit Beam Line National Nanotechnology Laboratory-tasc Istituto Nazionale Per La Fisica Materia (in
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Businaro Luca
Lilit Beam Line National Nanotechnology Laboratory-tasc Istituto Nazionale Per La Fisica Materia (in
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PRASCIOLU Mauro
LILIT Beam Line, National Nanotechnology, Laboratory-TASC, Istituto Nazionale per la Fisica Materia
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CARPENTIERO Alessandro
LILIT Beam Line, National Nanotechnology, Laboratory-TASC, Istituto Nazionale per la Fisica Materia
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KUMAR Rakesh
LILIT Beam Line, National Nanotechnology, Laboratory-TASC, Istituto Nazionale per la Fisica Materia
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COJOC Daunt
LILIT Beam Line, National Nanotechnology, Laboratory-TASC, Istituto Nazionale per la Fisica Materia
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CABRINI Stafeno
LILIT Beam Line, National Nanotechnology, Laboratory-TASC, Istituto Nazionale per la Fisica Materia
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ROMANATO Filippo
LILIT Beam Line, National Nanotechnology, Laboratory-TASC, Istituto Nazionale per la Fisica Materia
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RECCHIA Davide
AMPLIMEDICAL S. p. a
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PARMIGIANI Gaberiale
AMPLIMEDICAL S. p. a
関連論文
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