Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

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概要

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• Microfabrication processes of atomic force microscope (AFM) probe using SU-8 photoresist have been developed. Photolithographic patterning of the SU-8 on the anisotropically etched Si substrate produced the AFM cantilever with integrated tip. Use of the self-assembled monolayers and Al interlayer between the SU-8 and the Si substrate played a significant role for retrieving the probe out of the Si micromold without any damage. Fabricated SU-8 probe with a relatively sharp tip (radius of curvature ${\sim}80$ nm) had a resonant frequency of 44 kHz, which yields a spring constant of 0.248 N/m.

• Japan Society of Applied Physicsの論文
• 2003-10-01

著者

• Moon Jooho

  Department Of Ceramic Engineering Yonsei University

• Hong Seungbum

  Samsung Advanced Institute Of Technology

• Lee Jaekul

  Department of Ceramic Engineering, Yonsei University, Seoul 120-749, Korea

• Shin Hyunjung

  School of Advanced Materials Engineering, Kookmin University, Seoul 136-702, Korea

• Kim Sungdong

  Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea

• Chung Juhwan

  Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea

• Park Hongsik

  Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea

• Lee Jaekul

  Department Of Ceramic Engineering Yonsei University

• Park Hongsik

  Samsung Advanced Institute Of Technology

• Chung Juhwan

  Samsung Advanced Institute Of Technology

• Kim Sungdong

  Samsung Advanced Institute Of Technology

• Shin Hyunjung

  School Of Advanced Materials Engineering Kookmin University

関連論文

• Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

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