Low voltage FE-STEM for characterization of state-of-the-art silicon SRAM
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概要
- 論文の詳細を見る
- Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
- 2002-02-01
著者
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KOIKE Hidemi
Hitachi Co., Ltd
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J.perez-camacho Juan
Materials And Failure Analysis Group Intel Ireland Fab Operations Leixlip County Kildare
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Nakagawa Mine
Hitachi Science Systcms Ltd
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Sato M
Seiko Instruments Inc. Shizuoka Jpn
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DUNNE Robert
Materials and Failure Analysis Group, Intel Ireland Fab Operations, Leixlip, County Kildare
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SATO Mitsugu
Hitachi High-Technologies Corporation
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J.KENNEDY Barry
Materials and Failure Analysis Group, Intel Ireland Fab Operations, Leixlip, County Kildare
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Dunne Robert
Materials And Failure Analysis Group Intel Ireland Fab Operations Leixlip County Kildare
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J.kennedy Barry
Materials And Failure Analysis Group Intel Ireland Fab Operations Leixlip County Kildare
関連論文
- TEM Observation of Mechanically Alloyed Powder Particles (MAPP) of Mg-Zn Alloy Thinned by the FIB Cutting Technique
- Low voltage FE-STEM for characterization of state-of-the-art silicon SRAM