Electrostatic Suspension of 8-inch Silicon Wafer

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概要

• 論文の詳細を見る
• 静電気学会の論文
• 1997-03-31

著者

• Jeon Jong-up

  Kanagawa Academy Of Science And Technology

• Higuchi Toshiro

  Kanagawa Academy of Science and Technology

• JIN Ju

  Kanagawa Academy of Science and Technology

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• Electrostatic Suspension of 8-inch Silicon Wafer

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