Simple Method for Crystallizing Ceramic Thin Films Using Platinum Bottom Electrodes as Resistive Heating Elements

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概要

• 論文の詳細を見る

• A simple method for crystallizing amorphous thin films was developed using platinum bottom electrodes as heating elements. A current was applied to chromel wires in contact with the platinum and the temperature was measured using a type K thermocouple. A proportional feedback algorithm was used for controlling the process. The optimum parameters for the temperature control were determined and applied to the crystallization of PZT thin films. The results obtained for a heat treatment at 650°C with a 15°C/s heating and cooling rate showed a pure perovskite phase; the ferroelectric properties were comparable with those from conventional heat treatment methods.

• Japan Society of Applied Physicsの論文
• 2003-07-15

著者

• Joanni Ednan

  INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, Porto 4169-007, Portugal

• Mardare Andrei

  INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, Porto 4169-007, Portugal

• Mardare Cezarina

  INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, Porto 4169-007, Portugal

• Fernandes José

  INESC-Porto, Unidade de Optoelectrónica e Sistemas Electrónicos, 4169-007 Porto, Portugal

関連論文

• Bottom Electrode Crystallization of PZT Thin Films Deposited by Laser Ablation
• Simple Method for Crystallizing Ceramic Thin Films Using Platinum Bottom Electrodes as Resistive Heating Elements

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