Flexible Polysilicon Strain Gauge Array

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概要

• 論文の詳細を見る

• A flexible polysilicon strain gauge array has been realized using a surface micromachining technique with a SiO2 sacrificial layer. The realized sensor array is mechanically flexible, which can be attached on non-planar surfaces. To realize the flexible strain gauge module, a new packaging scheme using a polyimide circuit board and an oxide based surface-micromachining was developed. The proposed packaging scheme completes the strain sensors and the circuit board on a single process, which eliminates additional assembly and alignment problems. The measured gauge factor shows that it is more sensitive than metal strain gauges. Unlike a single-crystal silicon strain gauge, the proposed polysilicon gauge has no limitations in the direction of strain.

• Japan Society of Applied Physicsの論文
• 2003-07-15

著者

• Hwang Eun-soo

  Microsystems Laboratory Department Of Mechanical Engineering Yunsei University

• Kim Yong-Jun

  Microsystems Laboratory, Department of Mechanical Engineering, Yonsei University, 134 Shinchon-Dong,

• Kim Yong-jun

  Microsystems Laboratory Department Of Mechanical Engineering Yunsei University

関連論文

• Flexible Polysilicon Strain Gauge Array

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