Electrostatic linear micro actuator with vibrating motion (application to the focusing mechanism of a miniature CCD camera)
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概要
- 論文の詳細を見る
- 1998-05-01
著者
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Suzumori Koichi
Mechanical Systems Research Laboratories Research And Development Center Toshiba Corp
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Miyagawa Toyomi
Mechanical Systems Research Laboratories Research And Development Center Toshiba Corp
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Sekimura Masayuki
Mechanical Systems Laboratory R & D Center Toshiba Corp.
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Sekimura Masayuki
Mechanical Systems Research Laboratories Research And Development Center Toshiba Corp
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Koga Akihiro
Mechanical Systems Research Laboratories Research And Development Center Toshiba Corp
関連論文
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- Electrostatic linear micro actuator with vibrating motion (application to the focusing mechanism of a miniature CCD camera)