Static capacitance contrast of LSI covered with an insulator film in low accelerating voltage scanning electron microscope

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概要

• 論文の詳細を見る
• Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
• 2000-02-01

著者

• Ura Katsumi

  Osaka Sangyou University

• AOYAGI Sadao

  JEOL Ltd

• Aoyagi Sadao

  Jeol

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• Quantitative analysis of static capacitance contrast in scanning electron microscopy
• Contrast mechanism of negatively charged insulators in scanning electron microscope
• Static capacitance contrast of LSI covered with an insulator film in low accelerating voltage scanning electron microscope
• Initialization by erasing the surface potential of negatively charged insulators in scanning electron microscope (SEM) observation

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