Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions

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概要

• 論文の詳細を見る
• Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
• 2000-02-01

著者

• Oho Eisaku

  Department Of Electrical Engineering Kogakuin University

• Kawamata Shigeru

  Hitachi Science Systems Co. Ltd.

• Kawamata Shigeru

  Hitachi Science Systems Ltd

• OKUGAWA Kenichi

  Department of Electrical Engineering, Kogakuin University

• Okugawa Kenichi

  Department Of Electrical Engineering Kogakuin University

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• Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions
• Image quality improvement using helium gas in low voltage variable pressure scanning electron microscopy
• The Necessity and Utlity of a Scanning Electron Microscope with 4,096 Lines

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