SELF-ALIGNMENT TECHNIQUE OF SURFACE-MICROMACHINED OPTICAL SWITCHES TO BULK-MICROMACHINED V-GROOVES

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概要

• 論文の詳細を見る

• We report a new self-alignment technique of surface-micromachined polysilicon structures to bulkmicromachined silicon V-grooves which are used to accommodate optical fibers. Most of the conventional surface micromachined optical structures have used thin guiding rails or marks on a silicon substrate to align optical fibers to microstructures, and thus they require careful manual positioning. We have newly developed a technique to hold fibers in V-grooves, which have been defined at the same time as optical microstructures, to eliminate fiber manipulation for alignment. The process is simple with only two additional masks to the existing surface micromachining process and can be generally applied to MEMS fabrication.

• 社団法人 電気学会の論文
• 1999-02-01

著者

• FUJITA Hiroyuki

  University of Tokyo

• TOSHIYOSHI Hiroshi

  University of Tokyo

• Fujita H

  University Of Tokyo

• MIYAUCHI Daisuke

  TDK Corporation

関連論文

• A Method to Measure Beam Deflections in Different Resonance Modes Piezoresistively and its Incorporation into 2D Optical Microscanners
• SILICON MICRO MOTHERBOARDS FOR THREE - DIMENSIONAL ASSEMBLING OF MICRO SYSTEMS
• SELF-ALIGNMENT TECHNIQUE OF SURFACE-MICROMACHINED OPTICAL SWITCHES TO BULK-MICROMACHINED V-GROOVES

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