Micro-Actuators Using Acoustic Streaming Induced by High-Frequency Ultrasonic Waves

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概要

• 論文の詳細を見る
• 電気学会の論文
• 1998-07-01

著者

• Hashimoto Ken-ya

  Chiba University

• Yamaguchi Masatsune

  Chiba University

• Hashimoto Ken-ya

  Osaka Prefecture Seis Project

• IKETANI Kotaro

  Chiba University

• Ikekame Kotaro

  Chiba University

関連論文

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• Preparation of BST Ferroelectric Thin Film by Metal Organic Decomposition for Infrared Sensor
• Application of Ferroelectric BST Thin Film Prepared by MOD for Uncooled Infrared Sensor of Dielectric Bolometer Mode (特集:強誘電体薄膜材料とプロセス技術)
• Detector pixel in dielectric bolometer mode based on ferroelectric thin film capacitors for uncooled infrared image sensor
• Micro-Actuators Using Acoustic Streaming Induced by High-Frequency Ultrasonic Waves

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