Vibration and Acceleration Sensor Using the Optical Fiber with Bulb-End

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概要

• 論文の詳細を見る

• Vibration-sensor made of an optical fiber with bulb-end (this also acts as a seismic mass) in V-groove on an Si substrate is proposed, and fundamental characteristics of this sensor are demonstrated. Nearly flat frequency dependence of the optical output was obtained in the frequency range between observed 40 and 1200Hz under the constant acceleration. Resolution (or equivalent noise level) of 0.3m/s2 is attained in this prototype device. Vibrations with many modes in a vibrator are analyzed by FFT analysis of optical signals output from this vibration-sensor. Setting displacement of optical axes, about 30μm, between optical fiber with bulb-end (input fiber) and output fiber, and small amplitude of about 1μm of the input fiber lead to linear relationship between acceleration and optical output.

• 社団法人 電気学会の論文

著者

• Kimura M

  Tohoku‐gakuin Univ.

• Kimura Mitsuteru

  Tohoku-gakuin University

• TOSHIMA Katsuhisa

  Tohoku-Gakuin University

関連論文

• Ultraminiature Sensor for Thermal Analysis with an Air-Bridge Type Microheater
• Vibration and Acceleration Sensor Using the Optical Fiber with Bulb-End

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