Ultraminiature Sensor for Thermal Analysis with an Air-Bridge Type Microheater

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概要

• 論文の詳細を見る

• An ultraminiature sensor for thermal analysis is fabricated using micromachining technique and its fundamental characteristics are obtained. This device consists of monolithically integrated components of an air-bridge type microheater, a thin film thermocouple and a sample-holder. Boiling points of liquid samples, water and methanol, are clearly observed in the heating curve and the heating-rate curve, and sudden decrease of the temperature at the dropping time of the liquid sample without heating due to the effect of evaporation heat is also observed.

• 社団法人 電気学会の論文
• 1998-03-01

著者

• Kimura Mitsuteru

  Tohoku-gakuin University

• HAYASAKA Jun-ichi

  Tohoku-Gakuin University

関連論文

• Ultraminiature Sensor for Thermal Analysis with an Air-Bridge Type Microheater
• Vibration and Acceleration Sensor Using the Optical Fiber with Bulb-End

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