Met-Etch: Versatile Broad Ion Beam Etching System for Metallography Applicaitons

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概要

• 論文の詳細を見る
• 2000-05-01

著者

• ALANI R.

  Gatan Inc.

• MITRO R.J.

  Gatan R & D

• Mitro R.j.

  Gatan Inc.

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• Met-Etch: Versatile Broad Ion Beam Etching System for Metallography Applicaitons
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• REACTIVE ION BEAM ETCHING (RIBE) TECHNIQUE FOR CROSS SECTIONAL SEM SPECIMEN PREPARATION OF SEMICONDUCTORS

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