Trace Rare Gases Optical Emission Spectroscopy for Determination of Electron Temperatures and Species Concentrations in Chlorine-Containing Plasmas

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1998-04-01

著者

• Malyshev Mikhail

  Bell Laboratories Lucent Technologies

• Kornblit Avi

  Bell Laboratories Lucent Technologies

• DONNELLY Vincent

  Bell Laboratories, Lucent Technologies

• Donnelly Vincent

  Bell Laboratories Lucent Technologies

• CIAMPA Nicolas

  Bell Laboratories, Lucent Technologies

• COLONELL Jennifer

  Bell Laboratories, Lucent Technologies

• LEE John

  Bell Laboratories, Lucent Technologies

• Ciampa Nicolas

  Bell Laboratories Lucent Technologies

• Colonell Jennifer

  Bell Laboratories Lucent Technologies

• Lee John

  Bell Laboratories Lucent Technologies

関連論文

• Effects of Discharge Frequency in Plasma Etching and Ultrahigh-Frequency Plasma Source for High-Performance Etching for Ultralarge-Scale Integrated Circuits
• Trace Rare Gases Optical Emission Spectroscopy for Determination of Electron Temperatures and Species Concentrations in Chlorine-Containing Plasmas
• Trace Rare Gases Optical Emission Spectroscopy for Determination of Electron Temperatures and Species Concentrations in Chlorine-Containing Plasmas

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