Study of Ion-Induced Secondary Photon Emission in Reactive Ion Etching Experiment

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-01

著者

• Campos Delton

  Unicamp Institute Of Physics "gleb Wataghin" Deq

• Machida M

  Unicamp Institute Of Physics "gleb Wataghin" Deq

• MOSHKALYOV Stanislav

  UNICAMP, Institute of Physics "Gleb Wataghin" DEQ

• MACHIDA Munemasa

  UNICAMP, Institute of Physics "Gleb Wataghin" DEQ

• Moshkalyov Stanislav

  Unicamp Institute Of Physics "gleb Wataghin" Deq

関連論文

• Polymer-C_ Composite with Ferromagnetism
• Study of Ion-Induced Secondary Photon Emission in Reactive Ion Etching Experiment
• Experimental Study of Conventional and Multipass Thomson Scattering Diagnostic Systems
• A Contribution of Vibrationally Excited Cl_2 Molecules to GaAs Reactive Ion Etching in Cl_2/Ar
• Investigation of Ferroelastic Domain Boundary Structures of MP_5O_ (M: La-Tb) and LaNbO_4 by Means of Scanning Tunneling Microscope, Atomic Force Microscope, X-Ray and Neutron Diffraction Analyses
• Analytic Study on High-Voltage Crowbar System
• Observations of the Ferroelastic Domain Structure of MP_5O_ (M:La-Tb) by means of Scanning Tunneling Microscope, Electron Spin Resonance and X-Ray Diffraction
• Multiposition Multipass Thomson Scattering Diagnostic for Tokamak NOVA-UNICAMP

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