Plasma Immersion Ion Implantation for Electronic Materials
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概要
- 論文の詳細を見る
- 1996-02-01
著者
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Cheung N
Univ. California At Berkeley Ca Usa
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Linder Barry
Department Of Electrical Engineering And Computer Sciences University Of California Berkeley
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JONES Erin
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
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CHEUNG Nathan
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
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Jones Erin
Department Of Electrical Engineering And Computer Sciences University Of California At Berkeley
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Cheung Nathan
Department Of Electrical Engineering And Computer Sciences University Of California At Berkeley
関連論文
- Plasma Immersion Ion Implantation for Electronic Materials
- Reducing the Effects of Plasma Proximity in Plasma Immersion Ion Implantation