Formation of SiGe Source/Drain Using Ge Implantation for Floating-Body Effect Resistant SOI MOSFETs
スポンサーリンク
概要
- 論文の詳細を見る
- 1996-02-01
著者
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Nishiyama A
Advanced Lsi Technology Laboratory Toshiba Corporation
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ARISUMI Osamu
ULSI Research Laboratories, R & D Center, Toshiba Corporation
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TERAUCHI Mamoru
ULSI Research Laboratories, R & D Center, Toshiba Corporation
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NISHIYAMA Akira
ULSI Research Laboratories, R & D Center, Toshiba Corporation
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YOSHIMI Makoto
ULSI Research Laboratories, R & D Center, Toshiba Corporation
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TAKENO Shiroh
Environmental Engineering Laboratory, R&D Center, Toshiba Corporation
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SUZUKI Ken
Environmental Engineering Laboratory, R&D Center, Toshiba Corporation
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TAKAKUWA Chie
Environmental Engineering Laboratory, R&D Center, Toshiba Corporation
関連論文
- Analysis of Si-Ge Source Structure in 0.15 μm SOI MOSFETs Using Two-Dimensional Device Simulation
- Formation of SiGe Source/Drain Using Ge Implantation for Floating-Body Effect Resistant SOI MOSFETs
- Analysis of Si-Ge Source Structure in 0.15μm SOI MOSFETs Using Two-Dimensional Device Simulation
- Formation of SiGe Source/Drain Using Ge Implantation for Floating-Body Effect Resistant SOI MOSFETs