Control Performance of an Air-Spring Type Vibration Isolated Apparatus Having Pressure Feedback

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概要

• 論文の詳細を見る
• 1999-09-30

著者

• Wakui Shinji

  Canon Inc. Semiconductor Production Equipment Development Center

• KATO Hiroaki

  Canon Inc., Semiconductor Production Equipment Development Center

• Kato Hiroaki

  Canon Inc. Semiconductor Production Equipment Development Center

関連論文

• Control of an Air Spring Type Isolated Apparatus Using Restored Positioning Signal
• Control Performance of an Air-Spring Type Vibration Isolated Apparatus Having Pressure Feedback
• Control Performance of Three - Degrees - of - Freedom Micro - Moving Stage Using Motional Mode Decoupling Control together with Collocation Compensator
• An Identification Method of Physical Parameters for Positioning Mechanism
• Recognition of Base-Plate Acceleration Feedback Embedded in Stage Positioning Control System
• Relationship between Parameter Estimation Method Based on Bode Diagram and Co-quad Diagram

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