Control of an Air Spring Type Isolated Apparatus Using Restored Positioning Signal
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概要
- 論文の詳細を見る
- 1997-12-01
著者
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Wakui Shinji
Canon Inc. Semiconductor Production Equipment Development Center
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Asada Katsumi
Canon Inc. Semiconductor Production Equipment Development Center
関連論文
- Control of an Air Spring Type Isolated Apparatus Using Restored Positioning Signal
- Control Performance of an Air-Spring Type Vibration Isolated Apparatus Having Pressure Feedback
- Control Performance of Three - Degrees - of - Freedom Micro - Moving Stage Using Motional Mode Decoupling Control together with Collocation Compensator
- An Identification Method of Physical Parameters for Positioning Mechanism
- Recognition of Base-Plate Acceleration Feedback Embedded in Stage Positioning Control System
- Relationship between Parameter Estimation Method Based on Bode Diagram and Co-quad Diagram