Simulation of Growth Rate Variation of CVD-Mo Film along Axial Direction in Horizontal Tubular Reactor
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概要
著者
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Kikuchi Atsushi
Department Of Obstetrics And Gynecology Nihon University School Of Medicine
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Yoshikawa Noboru
Department Of Metallurgy Faculty Of Engineering Tohoku University
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Kikuchi Atsushi
Department Of Electronics Faculty Of Engineering Ibaraki University:(present Address) Texas Instrume
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Yoshikawa Noboru
Department of Materials Science and Engineering, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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